MRT

produkt description

The measuring plan-table MRT convinced by his accurate and repeatable positioning ability, and use in a vacuum chamber.

The table can be used for various applications. Whether for applying coatings, check or have a highly accurate measure requirement of wafers or other components.

technical data

• Dimensions 400 x 400 mm
• Radial run-out accuracy up to <= 0,02 µm
• Planless accuracy up to <= 0,02 µm
• Capacity axial* up to 200 N
• Capacity radial up to 170 N
• tumble 1,8 rad