Rotary Air Bearings

with Manufacturing Tolerances in the Nanometer Range

Rotary Air Bearings | Spherical Air Bearings | Rotary Tables for Various Applications

A team of innovative and experienced engineers has continuously advanced proven air bearing technology while simultaneously developing a new generation of high-performance rotary air bearings. Today, we are able to achieve levels of precision that set new standards for the future.

ESS rotary air bearings offer greater accuracy, reliability, and application flexibility than conventional air bearing systems. One of the key advantages is the proprietary ESS cyclic error compensation technology, which significantly reduces periodically occurring errors. As a result, radial and axial runout accuracies can be achieved that surpass previously attainable performance levels.

By utilizing advanced high-tech materials, many of which are also used in the aerospace industry, we are able to guarantee emergency run-out characteristics that significantly exceed conventional industry standards.

Our rotary air bearings are designed to meet not only today’s requirements in manufacturing and quality assurance, but also the demands of future precision technologies.

Another outstanding achievement of our engineering team is the development of precision rotary bearings for the testing and inspection of lithography optics used in semiconductor wafer exposure systems.