Measuring Rotary Table (MRT)
The MRT Measuring Rotary Table stands out through its highly accurate and repeatable positioning capabilities, as well as its suitability for operation in vacuum environments.
The table can be used for a wide range of applications, including coating processes, testing, and measurement of wafers or other components that require the highest levels of precision and accuracy.
Technical Description
| Dimensions | 400 × 400 mm |
| Radial Runout Accuracy | ≤ 0.02 µm |
| Axial Runout Accuracy | ≤ 0.02 µm |
| Axial Load Capacity* | up to 200 N |
| Radial Load Capacity | up to 170 N |
| Tilt Error | 1.8 µrad |