Vacuum-Preloaded Planar Air Bearing (DVL)

Vacuum-preloaded planar air bearings are retained on a guide surface through the simultaneous application of vacuum and air pressure. By precisely balancing the relationship between pressure and vacuum, the actual flying height of the air bearing and the resulting bearing stiffness can be optimally adjusted to suit the specific application.

In addition, this adjustment capability enables controlled positional changes in the sub-micron range in the vertical direction, providing exceptional precision for demanding positioning and measurement tasks.